With the development of new energy worldwide, the power semiconductor industry is developing rapidly. IGBT power module in the package welding has a low cavity rate, high reliability, eliminate oxidation, efficient production and other needs, and the current market for IGBT vacuum welding equipment there are many problems, such as substandard welding performance, poor stability, low production efficiency, or high price, long delivery and other problems.

In view of the needs and pain points of packaging and welding in the power semiconductor industry, Haobao technology R & D personnel under the guidance of well-known electronic packaging technology experts, Professor Wu Yiping of Huazhong University of Science and Technology and his team, developed a series of highly reliable, highly stable and efficient online formic acid vacuum welding furnace, which brings excellent packaging and welding solutions and equipment for power semiconductor manufacturing or packaging manufacturers.

According to the introduction, the device is suitable for power semiconductors (IGBT modules, MOSFET devices), advanced packaging, microelectronics hybrid assembly, photoelectric packaging, airtight packaging, wafer-level packaging, UHB LED packaging, MEMS packaging and so on. Now it has been verified and used in related domestic enterprises and research institutes.

An enterprise IGBT module manufacturing process flow chart ↓

Haobao on-line formic acid vacuum welding furnace Features:

01 Welding quality "high reliability"

The modular design of preheating zone, heating zone and cooling zone is adopted, and the vacuum degree, temperature and time of each zone can be independently controlled. Multi-stage vacuum curve and temperature curve can be set according to the process requirements, and the welding results can be repeated and traceable.

High air tightness structure design and welding assembly process, rapid vacuum, vacuum degree up to 1~10Pa, to achieve lower welding cavity rate, single cavity rate < 1%, total cavity rate ≤2%.

Comparison of common nitrogen reflow welding and vacuum formic acid furnace welding

Ø Support nitrogen, nitrogen + formic acid atmosphere environment, can be accurately controlled, efficient formic acid injection and recovery system, welding does not need flux, eliminate oxides through gas reduction, no residue after welding, no cleaning.

Ø The residual oxygen in the furnace is low, ≤10 ppm, effectively preventing metal oxidation.

02 Equipment running "high stability"

Ø The use of world-class electrical components, each carefully selected and deployed to ensure the stable and reliable operation of the equipment;

Ø The transportation system adopts servo motor and unique transmission structure design, small amplitude, accurate and stable transportation, avoiding displacement.

ØThe self-developed software control system can monitor the operating status of the equipment in real time, automatically store data, have three-level rights management, and can be connected to MES for automatic and intelligent management.

03 Workshop production "high efficiency"

Ø On-line three-cavity, four-cavity vacuum welding equipment, automatic production, to meet the needs of large-scale IGBT power module packaging production;

ØThe equipment adopts modular design, which can be upgraded from two cavities to three cavities and four cavities, so as to expand from small batch production to mass production. If the current production is not large, the customer can first choose a two-chamber vacuum furnace, and then increase to a three-chamber or four-chamber vacuum welding furnace as needed.

Ø High heating and cooling efficiency, accurate temperature control, heating rate ≥3℃/S, cooling rate ≥3℃/S, vacuum, nitrogen or formic acid fast, the overall continuous process time of 4~10min/ tray, to meet the requirements of efficient production;

Ø Heating system adopts special heating module, contact heating, long service life, greatly reduce the use and maintenance costs, improve production efficiency.

According to reports, the formic acid vacuum welding furnace has the advantages of low welding void-free rate, reliable quality, stable operation, efficient production, short delivery cycle, etc., in the forefront of similar domestic equipment, for IGBT power semiconductor manufacturers to provide domestic alternatives comparable to imported equipment.